Hot Plate EMS 1200

EMS 1200 Large Top Plate 250 x 250

The EMS 1200 is simply a larger version of the EMS 1000 model with the same specification and options. With the slightly higher achievable ramp rate of 30°C/min due to the 2kW of heating elements, compared to 960W in the EMS 1000.

The larger top plate is 250 x 250mm, this brings more versatility and the possibility for small batch processing, we can also customise the top plate to meet your substrate dimensions, including vacuum hole positions and Lift Pin capability.

Four of 100mm wafers

Lift Pin example for loading and unloading