Hot Plate EMS 1200

The EMS 1200 is simply a larger version of the EMS 1000 model with the same specification and options. With the slightly higher achievable ramp rate of 30°C/min due to the 2kW of heating elements, compared to 960W in the EMS 1000.

The larger top plate is 250 x 250mm, this brings more versatility and the possibility for a 200mm wafer or small batch processing, we can also customise the top plate to meet your substrate dimensions, including vacuum hole positions and Lift Pin capability.

Four of 100mm wafers
Lift Pin example for loading and unloading
EMS 1200-1 with Stainless Steel Lid
EMS 1200-1 with Lid and Nitrogen Purge
EMS 1200-3HT with lift Pins, Lid and Nitrogen purge
EMS 1200-3 4 X Lift Pins for 100mm wafers